ISO 14001
ISO 50001
ISO 9001
ISO 45001
Silicon trichloride is a product with a purity of over 99.99%.The largest amounts of silicon trichloride in its ultrapure form are used in the production of polysilicon, as well as for chemical vapour deposition of epitaxial layers of silicon or silicon carbide in the semiconductor industry or in electronics.
After purification to >6N quality, silicon trichloride is a precursor of polysilicon for photovoltaic arrays or semiconductor applications. Silicon trichloride is an excellent gaseous precursor in the production of silicon layers. The dominant path during deposition is (a) the chemisorption of *SiCl2 on the silicon surface and desorption of hydrogen chloride from the silicon surface: SiHCl3 → HCl + *SiCl2 and (b) the reduction of *SiCl2 by hydrogen: *SiCl2 + H2 → Si + 2HCl. Ultrapure silicon trichloride is also used the production of silicon carbide epitaxial layers.
Product advantages:
Applications:
Markets and applications
Electronic industry / Semiconductors
Power industry / Photovoltaics
Raw materials and intermediates
Function
Gaseous silicon precursor
Precursor in the epitaxy of silicon and silicon compounds
Segment
Chlorosilanes, raw materials and intermediates
Specialty Products / Specialty additives
