Ultrapure silicon trichloride (Ultrapure trichlorosilane)

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PCC Rokita SA / Chlorine Business Unit
Chemical name
Ultrapure silicon trichloride  (Ultrapure trichlorosilane)
Ultrapure silicon trichloride  (Ultrapure trichlorosilane)
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Inventory status General terms of sale
ISO 14001 ISO 14001 ISO 50001 ISO 50001 ISO 9001 ISO 9001 ISO 45001 ISO 45001
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Ultrapure silicon trichloride (Ultrapure trichlorosilane)
Available on request

Silicon trichloride is a product with a purity of over 99.99%.The largest amounts of silicon trichloride in its ultrapure form are used in the production of polysilicon, as well as for chemical vapour deposition of epitaxial layers of silicon or silicon carbide in the semiconductor industry or in electronics.

After purification to >6N quality, silicon trichloride is a precursor of polysilicon for photovoltaic arrays or semiconductor applications. Silicon trichloride is an excellent gaseous precursor in the production of silicon layers. The dominant path during deposition is (a) the chemisorption of *SiCl2 on the silicon surface and desorption of hydrogen chloride from the silicon surface: SiHCl3 → HCl + *SiCl2 and (b) the reduction of *SiCl2 by hydrogen: *SiCl2 + H2 → Si + 2HCl. Ultrapure silicon trichloride is also used the production of silicon carbide epitaxial layers.

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Properties and applications

Product advantages:

  • a product of very high purity for the photovoltaic arrays and semiconductor industry,
  • low content of free chlorine. 


  • feedstock for the production of ultra pure silicon trichloride for the production of polysilicon,
  • precursor in the epitaxy of silicon, silicon carbide, silicon nitride.
  • electronics industry – semiconductors,
  • energy industry – photovoltaics.

Markets and applications
Electronic industry / Semiconductors
Power industry / Photovoltaics
Raw materials and intermediates

Gaseous silicon precursor
Precursor in the epitaxy of silicon and silicon compounds


Chlorosilanes, raw materials and intermediates
Specialty Products / Specialty additives

Alternative names
Trichlorosilane, Trichlorosilane, Silicochloroform, Silicon chloride hydride (SiHCl3), CAS10025-78-2.

Manufacturer: PCC Rokita SA

PCC Rokita SA is one of the largest chemical companies in Poland as well as Central and Eastern Europe. Its activity includes the production of chloroalkali, polyether polyols, polyalkylene glycols and phosphorus derivatives.

PCC Group

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