PCC
RegisterLogin Page

Ultrapure silicon trichloride (Ultrapure trichlorosilane)

Ultrapure silicon trichloride (Ultrapure trichlorosilane)
Samples available
Ultrapure silicon trichloride  (Ultrapure trichlorosilane)
Ultrapure silicon trichloride  (Ultrapure trichlorosilane)
Certificates
ISO 14001ISO 14001 ISO 50001ISO 50001 ISO 9001ISO 9001 ISO 45001ISO 45001
PCC Group
Ultrapure silicon trichloride  (Ultrapure trichlorosilane)
Available on request

Silicon trichloride is a product with a purity of over 99.99%.The largest amounts of silicon trichloride in its ultrapure form are used in the production of polysilicon, as well as for chemical vapour deposition of epitaxial layers of silicon or silicon carbide in the semiconductor industry or in electronics.

After purification to >6N quality, silicon trichloride is a precursor of polysilicon for photovoltaic arrays or semiconductor applications. Silicon trichloride is an excellent gaseous precursor in the production of silicon layers. The dominant path during deposition is (a) the chemisorption of *SiCl2 on the silicon surface and desorption of hydrogen chloride from the silicon surface: SiHCl3 → HCl + *SiCl2 and (b) the reduction of *SiCl2 by hydrogen: *SiCl2 + H2 → Si + 2HCl. Ultrapure silicon trichloride is also used the production of silicon carbide epitaxial layers.

Properties and applications

Product advantages:

  • a product of very high purity for the photovoltaic arrays and semiconductor industry,
  • low content of free chlorine. 

Applications:

  • feedstock for the production of ultra pure silicon trichloride for the production of polysilicon,
  • precursor in the epitaxy of silicon, silicon carbide, silicon nitride.
  • electronics industry - semiconductors,
  • energy industry - photovoltaics.
Alternative names

Manufacturer: PCC Rokita SA

PCC Rokita SA is one of the largest chemical companies in Poland as well as Central and Eastern Europe. Its activity includes the production of chloroalkali, polyether polyols, polyalkylene glycols and phosphorus derivatives.

See other variations of this product
Ultrapure silicon trichloride (Ultrapure trichlorosilane)
Individual inquiries
PCC Group

Recently viewed products